A Novel Design Methodology for MEMS Micro Cantilever Triode Switch
Pamuleti Challa1, Lal Kishore Kondepudi2, Satyam Mandavilli3

1Pamuleti Challa*, Electronics and Communication Engineering, Sreenidhi Institute of Science and Technology Affiliated to Jawaharlal Technological University, Hyderabad, Telangana, India.
2Lal Kishore Kondepudi, Electronics and Communication Engineering, Formerly Vice Chancellor, Jawaharlal Technological University, Anantapur, (Andhra Pradesh), India.
3Satyam Mandavilli, Electronics and Communication Engineering, Formerly Professor, Indian Institute of Science, Banglore, India.
Manuscript received on September 20, 2019. | Revised Manuscript received on October 05, 2019. | Manuscript published on October 30, 2019. | PP: 3200-3206 | Volume-9 Issue-1, October 2019 | Retrieval Number: F8250088619/2019©BEIESP | DOI: 10.35940/ijeat.F8250.109119
Open Access | Ethics and Policies | Cite | Mendeley
© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)

Abstract: This paper describes a novel methodology for designing a MEMS (micro electromechanical systems) triode switch made up of a cantilever for a given set of performance parameters viz minimum pull-in voltage, on-time and off-time. These performance parameters are associated with MEMS triode switch structural parameters such as length, width, thickness, cross sectional area, initial gap between the electrodes and are found using MATLAB. A relational database using MS Access is created with the performance parameters and corresponding structural parameters. The switch(es) which satisfy the given specifications are retrieved based on data mining principle. An algorithm is written for mining the data from the database. A software package is developed for this algorithm in JAVA language for data mining. The designer can choose the switch(es) as per design constraints. This approach reduces the design cycle time of the MEMS triode switches.
Keywords: control electrodes, contact electrodes, DC voltage, MEMS triode switch, on-time, off-time, pull-in voltage, initial design, substrate, gap, electrostatic force, mechanical force, spring constant, bending moment, slope, deflection, mass, damping coefficient, relational database.