The Effect of Variable DC Gap and Various Piezo Electric Materials on Resonant Frequency in MEMS EVATunable Filters
Linsa M L1, Resmi R2

1Linsa M L, Department of ECE, LBS Institute of Technology for Women, Thiruvananthapuram (Kerala), India.
2Resmi R, Department of ECE, LBS Institute of Technology for Women, Thiruvananthapuram (Kerala), India.

Manuscript received on 15 August 2015 | Revised Manuscript received on 25 August 2015 | Manuscript Published on 30 August 2015 | PP: 226-229 | Volume-4 Issue-6, August 2015 | Retrieval Number: F4220084615/15©BEIESP
Open Access | Editorial and Publishing Policies | Cite | Mendeley | Indexing and Abstracting
© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (

Abstract: Micro Electro Mechanical Systems (MEMS) are systems based on a variety of technologies whereby tiny mechanical elements with excellent system properties can be implemented. Evanescent Mode (EVA) tunable cavity filters for RF/microwave frequencies shows potential components in communication system because of its extensive tuning range, elevated unloaded quality factor, reduced size and weight. The application of bring in voltage create electric field within the cavity. The electric field is produced in the gap connecting post and diaphragm. The effect of DC applied gap on electric field distribution for different values of input DC voltage in an EVA tunable MEMS structure is analyzed. The validation of scattering parameter (S21 parameter) is also done which indicates a shift in the resonant frequency with both negative and positive applied voltage. The resonant frequency shifts more in case of negative bias supply voltage. The various materials used for piezoelectric diaphragm varies the resonant frequency. The materials having similar chemical compositions results in identical frequency while having different engineered domain configuration have variable resonant frequency.
Keywords: Micro Electro Mechanical Systems(MEMS), Evanescent Mode Cavity Filter, DC Gap, S21 Parameter, Piezoelectric Diaphragm

Scope of the Article: Mechanical Design