Analysis of Pull-in Voltage of a Cantilever MEMS Switch with Variable Beam Parameters
Arathy U S1, Resmi R2

1Arathy U S, Department of ECE, LBS Institute of technology for Women, Thiruvananthapuram (Kerala), India.
2Resmi R, Department of ECE, LBS Institute of technology for Women, Thiruvananthapuram (Kerala), India.

Manuscript received on 15 August 2015 | Revised Manuscript received on 25 August 2015 | Manuscript Published on 30 August 2015 | PP: 214-220 | Volume-4 Issue-6, August 2015 | Retrieval Number: F4217084615/15©BEIESP
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Abstract: Micro Electro Mechanical Systems (MEMS) Switches have become very popular in the Electronics industry and we need to carefully select beam material for reliability and better performance. A variety of materials are available to be used as bridge material in RF MEMS switches. A cantilever beam is used to change the state and actuation of RF MEMS switch. It is made mostly using aluminum, copper or gold. This paper investigates which is the best material to be used as beam material for achieving lower pull-in voltage . The effect of different beam parameters on the RF and DC performance of MEMS series switches are also analyzed. Characterization of cantilever MEMS switches have been carried out by means of 3D simulation using COMSOL Multiphysics based on Finite Element Method [FEM]. Pull-in voltage can be reduced by carefully selecting beam material and it can further be reduced by modifying beam parameters. These parameters are also having a main role in improving RF performance of switches.
Keywords: Micro Electro Mechanical Systems (MEMS), MEMS Switch, Pull-in voltage, COMSOL.

Scope of the Article: Routing, Switching and Addressing Techniques