Hybrid FBAR Resonator Using ZNO Patterns And Study using 2D FEM Simulation
Kireeti Sarvardhapu1, G. Sai Krishna2

1Kireeti Sarvardhapu, Department of ECE [VLSI], Koneru Lakshmaiah Education Foundation, Guntur (A.P), India.
2G. Sai Krishna, Department of ECE, Koneru Lakshmaiah Education Foundation, Guntur (A.P), India.

Manuscript received on 18 April 2019 | Revised Manuscript received on 25 April 2019 | Manuscript published on 30 April 2019 | PP: 1393-1396 | Volume-8 Issue-4, April 2019 | Retrieval Number: D6820048419/19©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)

Abstract: This paper presents a new simple methodology for design of Hybrid Resonators. The FBAR resonator is designed maintaining same wavelength (λ) for IDT’s. The proposed design involves minimal amount of layers compared to earlier designs and structure is simple. Design model consist of Patterned ZnO structures placed in between IDT finger pairs. A Methodology for Designing Hybrid Type FBAR SAW/BAW resonators is described and its study by 2D Finite element model Simulations are mentioned in the paper. The results are optimal for the proposed design where longitudinal excitation provides greater k 2 eff of 0.49 than the lateral excitation
Keywords: FBAR, SMR, SAW & BAW, FEM, IDT

Scope of the Article: Pattern Recognition