Simulation and Comparison of Various Cantilever Beam For Pressure Sensor
R. S. Ernest Ravindran1, P. Mukul Sai2, R. Ajay Kanth3, K. Rajesh4, R. N. R. C. Tejaswini5, A. Panduranga6
1R.S.Ernest Ravindran, Department of ECE, KLEF, (Deemed to be University), Guntur (A.P), India.
2P. Mukul Sai, KLEF (Deemed to be University), Guntur (A.P), India.
3R. Ajay Kanth, KLEF (Deemed to be University), Guntur (A.P), India.
4K. Rajesh, KLEF (Deemed to be University), Guntur (A.P), India.
5R. N. R. C. Tejaswini, KLEF(Deemed to be University), Guntur (A.P), India.
6A. Panduranga, KLEF (Deemed to be University), Guntur (A.P), India.
Manuscript received on 18 April 2019 | Revised Manuscript received on 25 April 2019 | Manuscript published on 30 April 2019 | PP: 1320-1325 | Volume-8 Issue-4, April 2019 | Retrieval Number: D6631048419/19©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: Micro cantilever used for detecting the changes due to the cantilever bending and from it, vibrational frequencies can be analyzed. In this investigation, various materials like Silicon, Gold, Bismuth and Platinum were used to simulate cantilever beam. The simulation is carried out by using comsol multi physics. Each cantilever were characterized by various parameters such as Force, Displacement, Relative permittivity, Young’s modulus and Poisson’s ratio. Bismuth material is observed to have high sensitivity that is due to the properties of the material. Cantilever simulated using Bismuth material can be applicable for pressure sensor applications.
Keywords: Cantilever Beam, COMSOL Multiphysics, Displacement, MEMS
Scope of the Article: Wireless Sensor Networks