Analysis and Design of Micro-Electromechanical Sensors
Mina Safwat Garas1, Hassan El-Kamchouchi2, Tawfik Namour3
1Mina Safwat Garas, Elect. Eng. Dept., Fac. of Eng., Alex. Univ., Alexandria, Egypt.
2Hassan El-Kamchouchi , Prof. Dr, Elect. Eng. Dept., Fac. of Eng., Alex. Univ., Alexandria & Egypt SM IEEE,
3Tawfik Namour, Dr. Elect. Eng. Dept., Fac. of Eng., Alex. Univ., Alexandria, Egypt.
Manuscript received on 15 April 2016 | Revised Manuscript received on 25 April 2016 | Manuscript Published on 30 April 2016 | PP: 161-165 | Volume-5 Issue-4, April 2016 | Retrieval Number: D4524045416/16©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: In developing Micro Electro Mechanical Systems (MEMS), using the MATLAB software , many modeling tasks in MEMS can be implemented easily. Additionally, their performance can also be determined so that it satisfies the needs of various fields. With this kind of approach, the performance of the devices can be easily expanded, as well as reducing the time and cost of MEMS production. This paper focuses on the modeling of silicon MEMS accelerometer in an attempt to design a surface micro-machined accelerometer that satisfies certain pre-determined specifications.
Keywords: Component; Acceleration, Accelerometer, Design, Displacement, MEMS, Modeling, Velocity
Scope of the Article: Image Analysis and Processing