Comparative Study of Different Flexures of MEMS Accelerometers
Avinash Kamble1, Siddheshwar Khillare2
1Avinash Kamble, Asst. Prof. Department of Mechanical Engineering, NK Orchid College of Engineering and Technology, Solapur, India.
2Siddheshwar Khillare, Asst. Prof. Department of Mechanical Engineering, NK Orchid College of Engineering and Technology, Solapur, India.
Manuscript received on January 08, 2015. | Revised Manuscript received on January 23, 2015. | Manuscript published on February 28, 2015. | PP: 22-25 | Volume-4 Issue-3, February 2015. | Retrieval Number: C3712024315/2013©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: There is a greater demand for developing a monolithic 3- axis accelerometer. The main challenges for developing a 3-axis accelerometer are- the size factor, realizing z-axis sensing, and decoupling the motions of the structure in three mutually perpendicular directions. With this motivation, we analyze structures using different flexures and evaluate their compliance and natural frequencies in three orthogonal directions. In this paper, the analytical and numerical study of different flexures such as straight-beam flexures, crab-leg flexures, serpentine flexures, and folded flexures is done. First, the concept of lumped parameter is described in brief, then numerical simulation of flexures is done using software ANSYS. Finally, a comparison of the analytical and numerical results is presented.
Keywords: MEMS Accelerometer, Simulink Model.